Tousimis Research Corporation manufactures a comprehensive range of Critical Point Dryers for biological laboratory research applications. Manual, semi-automatic and fully automatic versions are available and a special series of supercritical CPD’s are available for MEMS/NEMS applications.
The design concepts of the Tousimis Autosamdri® Critical Point Dryers are unique and their patent-pending “Stasis” processing software ensures perfect critical point drying for all samples.
For more information on Tousimis Critical Point Dryers, Please contact us.
**NEW** Touchscreen Series C
- Award Winning ‘Stasis Software’
- New ‘Post Process Data Review’ Capability
- Advanced Hardware Design
- 4″, 6″ and 8″ Chamber Sizes
- Made in USA
- Autosamdri® -934 – Touchscreen control automated CPD system for up to 5 x 4″ wafers
- Automegasamdri® -936 – Touchscreen control automated CPD system for up to 5 x 6″ wafers
- Automegasamdri® -938 – Touchscreen control automated CPD system for up to 5 x 8″ wafers
Autosamdri®-931 – Cleanroom and Non-Cleanroom versions
Brochures can be downloaded from the following links:
Non-Cleanroom Systems
- Autosamdri® -931 – Programmable automatic Critical Point Dryer with STASIS Software
- Samdri® -PVT-3D – Advanced Manual Critical Point Dryer
- Samdri®-795 – Semi automatic Critical Point Dryer
- Autosamdri® -815 – Series A Fully automatic Critical Point Dryer
- Autosamdri® -815B -Series A Large capacity fully automatic Critical Point Dryer
Cleanroom Systems
The Samdri® line of Supercritical Point Dryers is successfully used to increase yield and uniformity of MEMS devices. Liquid carbon dioxide is the transitional fluid used to process your delicate MEMS. The tousimis Samdri® line of Supercritical Point Drying tools used for the MEMS CO2 dry release after wet etching is a most beneficial anti-stiction tool for the MEMS fab.
- Autosamdri® -934 – Touchscreen control automated CPD system for up to 5 x 4″ wafers
- Automegasamdri® -936 – Touchscreen control automated CPD system for up to 5 x 6″ wafers
- Automegasamdri® -938 – Touchscreen control automated CPD system for up to 5 x 8″ wafers
- Autosamdri® -931 – Programmable automatic Critical Point Dryer with STASIS Software
- Autosamdri®-815 – Series B Supercritical CPD MEMS Critical Point Dryer for 1“ wafers
- Autosamdri® -815B – Series B Supercritical CPD MEMS Critical Point Dryer for 4“ wafers
- Automegasamdri®-915B – Series B Supercritical CPD MEMS Critical Point Dryer for 6“ wafers
